Turbomolecular pump

for compact, efficient vacuum systems


The EXT406PX pump allows customers to build cost-effective, compact vacuum systems, capable of withstanding high backing pressures even withcontinuous gas loads at the main inlet, and not just at ultimate vacuum. The pump combines turbomolecular and drag stages with an innovative fluid dynamic stage, achieving the same gas flow using a smaller backing pump. It offers high-speed, low-pressure performance and is available in two ranges. The ISO and CF 160 have Nitrogen (N2) pumping speeds of 400l/s (N2) and the ISO and CF 100 have N2 pumping speeds of 310l/s (340l/s for He). It can sustain normal operation at a backing pressure of up to 17mbar. It features an optional inlet port, which can offer additional steady-state pumping speeds up to 24m3/hr-1 at a pressure up to 4mbar. The EXT406PX is supplied with a trapped o-ring seal for ISO variants or a 160 °C annealed copper gasket for the CF, both have inlet screens fitted.



Edwards
Manor Royal
Crawley RH10 2LW Clwyd
United Kingdom
tel: +44-1293-603507
fax: +44-1293-533453

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