Nano Flow Sensors

for high pressure applications


The SLG1430 series of nano flow meters for microfluidic systems is designed for high pressure applications. The sensors undergo a pressure test at 400 bar after assembly. Recommended maximum pressure during operation is 350 bar. The CMOSens microchips are able to detect flow rates in the range of a few micro liters or nanoliters per minute. They are mounted on the outside of an internal fused silica capillary and detect the flow in a media isolated way. The fusion of digital signal processing with a calorimetric flow sensor element on a single semiconductor chip instrument results in linear, completely
calibrated nanoflow sensors with a high resolution. The technology ensures a repeatability of better than 0.8% for analyses and a fast
response time of<50 ms. The devices offer
resolutions down to 0.5 nl/min and better. They are equipped with microfluidic connectors for OD360 capillaries and a digital RS232 interface. Customized OEM solutions are available on request.



Sensirion AG
Laubisrütistrasse 50
Stäfa ZH 8712
Switzerland
tel: +41-44-306 40 00
fax: +41-44-3064030

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